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Produktbild: Transparent Oxide Electronics

Transparent Oxide Electronics From Materials to Devices

177,99 €

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Beschreibung

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

16.04.2012

Verlag

John Wiley & Sons

Seitenzahl

320

Maße (L/B/H)

24,9/17/2 cm

Gewicht

680 g

Auflage

1. Auflage

Sprache

Englisch

ISBN

978-0-470-68373-6

Beschreibung

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

16.04.2012

Verlag

John Wiley & Sons

Seitenzahl

320

Maße (L/B/H)

24,9/17/2 cm

Gewicht

680 g

Auflage

1. Auflage

Sprache

Englisch

ISBN

978-0-470-68373-6

Herstelleradresse

Libri GmbH
Europaallee 1
36244 Bad Hersfeld
DE

Email: GPSR Kontakt

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  • Produktbild: Transparent Oxide Electronics
  • Preface xiii
     
    Acknowledgments xv
     
    1 Introduction 1
     
    1.1 Oxides and Transparent Electronics: Fundamental
     
    Research or Heading Towards Commercial Products? 1
     
    1.2 The Need for Transparent (Semi) Conductors 3
     
    1.3 Reaching Full Transparency: Dielectrics and Substrates 5
     
    2 N-type Transparent Semiconducting Oxides 9
     
    2.1 Introduction: Binary and Multicomponent Oxides 9
     
    2.1.1 Binary Compounds: the Examples of Zinc Oxide and Indium Oxide 9
     
    2.1.2 Ternary and Quaternary Compounds: the Examples of Indium-Zinc Oxide and Gallium-Indium-Zinc Oxide 12
     
    2.2 Sputtered n-TSOs: Gallium-Indium-Zinc Oxide System 16
     
    2.2.1 Dependence of the Growth Rate on Oxygen Content in the Ar+O2 Mixture and Target Composition 16
     
    2.2.2 Structural and Morphological Properties 18
     
    2.2.3 Electrical Properties 22
     
    2.2.3.1 Effect of oxygen content in the Ar + O2 mixture 22
     
    2.2.3.2 Effect of composition (binary, ternary and quaternary
     
    compounds) 24
     
    2.2.3.3 Effect of annealing temperature 27
     
    2.2.3.4 Additional considerations about the conduction mechanisms in oxide semiconductors 30
     
    2.2.3.5 Effect of thickness (ds) 39
     
    2.2.3.6 Electrical stability measurements 39
     
    2.2.4 Optical Properties 41
     
    2.2.4.1 General considerations about the optical measurements 41
     
    2.2.4.2 Effect of oxygen content in the Ar + O2 mixture 43
     
    2.2.4.3 Effect of composition (binary and multicomponent oxides) 44
     
    2.2.4.4 Effect of annealing temperature 46
     
    2.3 Sputtered n-TSOs: Gallium-Zinc-Tin Oxide System 49
     
    2.4 Solution-processed n-TSOs 51
     
    2.4.1 ZTO by Spray-pyrolysis 51
     
    2.4.2 ZTO by Sol-gel Spin-coating 52
     
    2.4.3 GIZO Sol-gel by Spin-coating 52
     
    3 P-type Transparent Conductors and Semiconductors 63
     
    3.1 Introduction 63
     
    3.2 P-type Transparent Conductive Oxides 64
     
    3.3 Thin Film Copper Oxide Semiconductors 66
     
    3.3.1 Role of Oxygen in the Structure, Electrical and Optical Performance 70
     
    3.3.1.1 Structure evaluation 70
     
    3.3.1.2 Electrical properties evaluation 71
     
    3.3.1.3 Optical properties evaluation 74
     
    3.4 Thin Film Tin Oxide Semiconductors 75
     
    3.4.1 Structure, Composition and Morphology of Tin Oxide Films 79
     
    3.4.1.1 Structure evaluation 79
     
    3.4.1.2 Morphology evaluation 84
     
    3.4.2 Electrical and Optical Properties of Tin Oxide Films 84
     
    3.4.2.1 Electrical properties evaluation 84
     
    3.4.2.2 Capacitance measurements 89
     
    3.4.2.3 Optical properties evaluation 92
     
    4 Gate Dielectrics in Oxide Electronics 101
     
    4.1 Introduction 101
     
    4.2 High-k Dielectrics: Why Not? 102
     
    4.3 Requirements 103
     
    4.4 High-k Dielectrics Deposition 106
     
    4.5 Sputtered High-k Dielectrics in Oxide TFTs 106
     
    4.6 Hafnium Oxide 107
     
    4.6.1 Multicomponent Co-sputtered HfO2 Based Dielectrics 117
     
    4.6.2 Multicomponent Dielectrics from Single Target 126
     
    4.7 Tantalum Oxide (Ta2O5) 130
     
    4.7.1 Multicomponent Ta2O5 Based Dielectrics 133
     
    4.8 Multilayer Dielectrics 138
     
    4.9 High-k Dielectrics/Oxide Semiconductors Interface 141
     
    4.10 Summary 146
     
    5 The (R)evolution of Thin-Film Transistors (TFTs) 155
     
    5.1 Introduction: Device Operation, History and Main Semiconductor Technologies 155
     
    5.1.1 Device Structure and Operation 155
     
    5.1.2 Brief History of TFTs 161
     
    5.1.3 Comparative Overview of Dominant TFT Technologies 168
     
    5.2 Fabrication and C