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Produktbild: Handbook of Vacuum Science and Technology

Handbook of Vacuum Science and Technology

227,99 €

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Beschreibung

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

Oktober 1997

Herausgeber

Bawa Singh + weitere

Verlag

Academic Pr Inc

Seitenzahl

835

Maße (L/B/H)

23,5/15,8/4,5 cm

Gewicht

1324 g

Sprache

Englisch

ISBN

978-0-12-352065-4

Beschreibung

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

Oktober 1997

Herausgeber

Verlag

Academic Pr Inc

Seitenzahl

835

Maße (L/B/H)

23,5/15,8/4,5 cm

Gewicht

1324 g

Sprache

Englisch

ISBN

978-0-12-352065-4

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  • Produktbild: Handbook of Vacuum Science and Technology
  • Fundamentals of Vacuum Technology and Surface Physics
    B. Singh and J.H. Thomas, III
    Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science
    Creation of Vacuum
    M. Hablanian
    The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps
    Vacuum Measurements
    H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr.,
    Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements
    Systems Design and Components
    Components for Vacuum Equipment and Systems:
    N.T. Peacock
    Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces
    Vacuum Applications
    High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes
    Large-Scale Vacuum Based Processes
    W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.